Most of the tools listed below can also be used to process 150mm, 100mm, and 75mm wafers:

• 1 Plasma-Therm versalok 200mm wafer 2 chamber ICP etch tool
  
• 4 wet benches for wet etch and wafer cleaning
  
• 1 O2-plasma strip system
  
• 1 AMAT metal etch system
  
• 2 Strasbaugh dual platten CMP tools