Comprehensive research and process tools and instruments are in place to study nano/micro systems, nanoelectronics, nanophotonics, nanotechnology applications in the energy and power arenas and general nanoscale science and technology.

Extreme Ultraviolet (EUV) Lithography Alpha Demo Tool 

Major Wafer Processing Capabilities

Lithography and Patterning Tools

Thin Film Deposition and Growth Tools

Etch and Planarization Tools

Compound Semiconductor Processing Capabilities

Compound Semiconductor Processing Tools

Metrology

Analytical and Characterization Capabilities

Other Analytical Capability

Sample Preparation