CNSE’s Albany NanoTech complex provides technology acceleration and business incubation support for onsite corporate partners including IBM, TEL, Applied Materials, ASML and International SEMATECH North, as well as other “next generation” nanotechnology research activities.

NanoFab North, completed in December 2005, is a 228,000 square foot, $175 million facility including 35,000 square feet of cleanroom space with Class 1 capable 300mm wafer production. The NFN facility also houses the world’s first extreme ultraviolet (“EUV”) Alpha Demo Tool, developed by ASML.

NanoFab South, completed in March 2004, is a 150,000 square foot, $50 million facility including 32,000 square feet of cleanroom space. The facility also includes classrooms and offices for the College of Nanoscale Science and Engineering.

NanoFab 200 (also known as CESTM) was completed in June 1997. This 70,000 square foot, $16.5 million facility includes 4,000 square feet of cleanroom space, plus CNSE metrology labs and office space for programs such as the State University of New York’s Atmospheric Sciences Research Center.

NanoFab East was completed in March 2009. The $150 million project includes a 250,000-square-foot office, laboratory and classroom building and a separate 100,000-square-foot building that houses 15,000 square feet of 300mm wafer, class 1 capable cleanroom space. 

In sum, CNSE's $5 billion Albany NanoTech Complex totals 800,000 square feet of cutting-edge facilities with 80,000 square feet of 300mm wafer, class 1 capable cleanrooms, with more than 2,500 R&D jobs on site.