World-Class Resources > Metrology Labs > Analytical & Characterization Techniques > Phi 6650 Dynamic SIMS

• Cs sputter gun
• 500eV to 11kev bombardment
• Depth profiling with detection limits as low as 1E15/cm3

Typical applications: dopant measurements; impurity content and distribution; elemental measurements from H to U; semiconductors, metals, dielectrics

Dynamic SIMS Data