World-Class Resources > Metrology Labs > Analytical & Characterization Techniques > JEOL 2010F FE-TEM

• Beam - 200 keV
• Probe size (field emission) - 0.5 nm
• Sample size - TEM grid - 3 mm
• Resolution - 1.9Å spatial, 1.02 Å lattice
• Energy Dispersive X-ray Spectroscopy (EDS)
• Electron Energy Loss Spectroscopy (EELS) 
• Energy-filtered imaging
• Cryogenic specimen holder

Typical applications: crystalline structure, lattice defects; thin layer metrology, process-induced defects, liners, gate oxides; novel devices, III-V materials; carbon nanotubes

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