World-Class Resources > Metrology Labs > Analytical & Characterization Techniques > Hitachi S-5200 SEM

• Top-down and x-section SEM
• Imaging resolution 1 nm@30kV 
• Film thickness resolution 5 nm 
• Maximum sample size 4x7mm

Typical applications: cross-section morphology of devices; layer thickness; etch profiles and undercut; feature dimensions

SEM Data

Etch Features

Comparison of surface texture