World-Class Resources > Metrology Labs > Analytical & Characterization > Thermo VG Theta Probe XPS
Thermo VG Theta Probe XPS
The 2-dimensional detector in the Thermo-VG Scientific XPS system will allow simultaneous collection of spectral data from all angles without tilting the sample.
Spatial resolution < 50 µm
Angle resolved XPS using 2-D multi-channel detector
Computer controlled automated analysis
Chemical state spatial mapping
Typical applications: ultra thin films, small area characterization