World-Class Resources > CNSE Wafer Processing Research & Development > Metals > Metal and HiK Films
Metal and HiK Films
The following 300mm Metalization processes are available at the CNSE fabrication facilities.
Tools: Applied Materials Endura - Anelva
FEOL Films:
NiPt (5%)
Ti, TiN, TiOx
Si
Ta, TaN, TaOx
BEOL Films:
Ta, TaN
Cu
Ti