World-Class Resources > CNSE Wafer Processing Research & Development > Film Deposition > Metals > Metal and HiK Films

The following 300mm metalization processes are available at the CNSE fabrication facilities.

Tools: Applied Materials Endura - Anelva

FEOL Films:
NiPt (5%)
Ti, TiN, TiOx
Si
Ta, TaN, TaOx
LaOx

BEOL Films:
Ta, TaN
Cu
CVD Co
Ti