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FEOL Metallization
FEOL Metallization
PVD Ti/TiN: 1000Å, 500Å, 350Å, 300Å, 250Å, 200Å
PVD NiPt: 200Å/100ÅTiN, 150ÅNiPt /100ÅTiN, 100ÅNiPt /100ÅTiN, 50ÅNiPt /100ÅTiN, 30ÅNiPt /100ÅTiN
PVD Gate Quality TiN: 1000Å, 700Å, 500Å, 300Å, 250Å, 200Å, 150Å, 100Å, 70Å, 60Å, 50Å, 40Å, 30Å, 20Å
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