World-Class Resources > CNSE Wafer Processing Research & Development > Film Deposition > BEOL CVD Films

• PECVD Nitride
• CVD TEOS 10,000Å, 8,000Å, 4,500Å, 3,000Å, 1,000Å, 500Å, 350Å
• Black Diamond (BD3.0, BD2.7, BD2.4)

BD3.0: 3,300Å, 3,000Å, 1,600Å,
BD2.7: 3,300Å,
BD2.4: 5,000Å, 3,300Å, 3,000Å, 2,500Å, 1,600Å,

• CVD SiCN Films 250Å, 350Å, 500Å
• SiON (DARC): 800Å, 600Å, 400Å, 250Å