World-Class Resources > CNSE Wafer Processing Research & Development > CMP
CMP
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"Whether it is polishing or
planarization, from frontend
to backend, we have a solution."
Tricia Burroughs
Chemical & Mechanical
Planarization Process Engineering |
The following 300mm CMP processes are available at the CNSE fabrication facilities:
CMP Tools
CMP Processes
CMP Related Metrology, Inspection, and Review
CMP Tools - Slurry Chem Line Set-up AMAT
CMP Tools - Slurry Chem Line Set-up Ebara