World-Class Resources > CNSE Wafer Processing Research & Development

“Offering state-of-the-art equipment, a strong consortium of equipment suppliers and an innovative technical support staff, CNSE has provided Tokyo Electron with the unique opportunity and environment in which to conduct leading-edge R&D work in a timely, cost-effective manner.” Hiroshi Takenaka, President and CEO of Tokyo Electron Limited

The College of Nanoscale Science and Engineering offers a full suite of state-of-the-art 300mm wafer processing and analytical technologies. The 80,000 square feet of fabrication facilities located at CNSE's Albany NanoTech Complex house more than 120 wafer processing and inline metrology tools. The tool sets installed in CNSE's world-class facilities are dedicated to supporting the industry's wafer processing needs for the next several device generations ranging from 65nm to 15nm, and allowing exploratory work in support of full scaled nanotechnology.

CNSE's next-generation facilities are currently operational with a fully enabled 65nm low power CMOS and RF CMOS offering, and with a 28nm node installation planned for 2011. Early user hardware, custom R&D and

on-demand derivative development support is provided at CNSE with access to unique state-of-the-art industry standard semiconductor fabrication facilities, which serves as a technology test-bed leading to the development, demonstration, integration and qualification of advanced fabrication technologies for the semiconductor industry.

The CNSE facilities house 300mm advanced lithography platforms to support 193nm immersion lithography development and EUV lithography development. Also installed are advanced wafer platforms for planarization, copper plating, etch development, ion implantation, thin film development and wet cleaning technology. Our service offerings include but are not limited to, Lithography Services, Film Deposition, CMP, Etch Services, Mask Sets, Derivatives, Hot Processes, Metals, Wets, Implants and Material Analytical Services.

Learn more about the fully-integrated research, development, prototyping and educational facilities at CNSE's Albany NanoTech Complex.