World-Class Resources > 200mm Wafer Fabrication > Tools > Compound SC Processing
Compound SC Processing
- 1 Two-chamber Applied EPI Mod GEN II molecular beam epitaxy (MBE) system
- 2 Emcore MOCVD systems for GaN growth
- Integrated ultra high vacuum molecular beam epitaxy (Veeco Gen II) and low temperature scanning tunneling microscopy facility for compound semiconductor surface studies and spintronics research.
For compound semiconductor device fabrication, many of the 200mm wafer process tools can be used.