World-Class Resources > 200mm Wafer Fabrication > Tools > Analytical & Characterization JEOL 2010F Transmission Electron Microscope (TEM) with EELS
Typical applications: Carbon nanotubes, quantum well structures, liners, gate oxides

JEOL 200 CX Transmission Electron Microscope (TEM)
Typical applications: Characterization of gate oxides, devices, quantum structures

LEO 1550 Scanning Electron Microscope with a ThermoNoran Voyager Energy Dispersive X-ray Detector and a MaxRAY WDS system
Typical applications: Device structures, polymers, organic materials

Hitachi S-4000 Scanning Electron Microscope (SEM) with Energy Dispersive X-ray Detector
Typical applications: Imaging of small structures, cross sectioned devices, chemical analyses

FEI Nova NanoLab 600 Dual Beam with Energy Dispersive Spectroscopy, Electron Back-Scatter Pattern, CRYO stage capabilities
Typical applications: Cross-sectioning chips for 3-D reconstructions, studying fundamental particle-solid interactions

JEOL 8600 WDS Microprobe with 4 crystal detectors
Typical applications: Chemical analysis of features and films, imaging of sub-micron features

FEI Focused Ion Beam System (FIB)
Typical applications: TEM sample preparation

Thermo VG Scientific Theta Probe X-ray Photoelectron Spectroscopy (XPS)
Typical applications: Ultra thin films, small area characterization

Bruker D8 DISCOVER High Resolution X-ray Diffractometer
Typical applications: High resolution X-ray reflectometry for thin film structure (thickness, density, roughness); high resolution double- and triple-axis rocking curves of bulk and thin-film single crystal materials; triple axis reciprocal space mapping; polycrystalline thin film powder diffraction

AMAT G2 SEMvision FIB-SEM
Typical applications: Structure, composition and defect analysis on 200 and 300 mm wafers

2 Perkin-Elmer PHI 600 Auger Electron Spectroscopy
Typical applications: Surface chemistry, sputter depth profiling

Perkin-Elmer PHI 6300 Quadrupole Dynamic Secondary Ion Mass Spectrometer (SIMS)
Typical applications: Dopant profiling, trace impurity measurement

Scintag X-ray Diffractometer (XRD)
Typical applications: Structure and composition of thin films and powders

SOPRA Spectroscopic Ellipsometer
Typical applications: Film thickness; material optical constants

Digital Instruments Nanoscope III Scanning Probe Microscope (SPM)
Typical applications: Surface roughness, dimensional analyses

Digital Imaging Atomic Force Microscope (AFM)
Typical applications: Surface roughness, etc.

JEOL 4200 Atomic Force Microscope (AFM)
Typical applications: Surface roughness, dimensional analysis

Linear Accelerator: http://alpha.acclab.albany.edu/
Rutherford back-scattering (RBS) analysis
Nuclear reaction analysis (NRA)
Typical applications: Composition, implantation

For more information and inquiries, contact Richard Moore, Characterization Lab Manager: RMoore@uamail.albany.edu.