World-Class Resources > 200mm Wafer Fabrication > Tools
Tools
Comprehensive research and process tools and instruments are in place to study nano/micro systems, nanoelectronics, nanophotonics, nanotechnology applications in the energy and power arenas and general nanoscale science and technology.
Extreme Ultraviolet (EUV) Lithography Alpha Demo Tool Major Wafer Processing Capabilities Lithography and Patterning Tools
Thin Film Deposition and Growth Tools
Etch and Planarization Tools
Compound Semiconductor Processing Capabilities Compound Semiconductor Processing Tools
Metrology Analytical and Characterization Capabilities
Other Analytical Capability
Sample Preparation