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Nanoscale Engineering: Nanosystem Engineering and Technology

Associated Faculty: Castracane, Liehr, Paluh, Tokranova

This track focuses on the design, fabrication, packaging, and testing of nano/micro-electrical and nano/micro-opto-electrical mechanical components and nano/micro-fluidic components for incorporation in system-on-a-chip (SOC) architectures and systems.

Foundations Courses: Because this track is part of the Nanoscale Engineering program, it is recommended that students wishing to prepare for it pursue the Nanoengineering Qualifying Examination. Students without adequate background in the following subjects should take the corresponding Foundation Courses:

506 Phase Equilibria
506 Kinetics & Transport
506 Mechanics of Materials
507 Quantum 1A
507 Quantum 1B
507 Molecular Materials
508 Nanoscale Analytic Techniques
508 Practical Modeling
509 Surfaces and Interfaces
509 Deposition for Ultra-Thin films
509 Polymeric and Amorphous Materials
509 Introduction to NEMS/MEMS
509 Surfaces and Interfaces
512 Quantum Theory of Solids II (3)

Optional (based on background)
504 Chemical Principles
507 Mathematical Methods

Track-Specific Coursework: Students must take 9 credits of track-specific coursework from the following list. These courses were selected to provide students with a strong foundation for their research in nanosystem engineering.

605 Integrated Circuit Manufacturing I (3)
609 Electronics Packaging Fundamentals (3)
631 The Science and Technology of MEMS and NEMS (3)