Perkin-Elmer PHI 6300 Quadrupole Dynamic Secondary Ion Mass Spectrometer (SIMS)

Cs ion source for negative ion spectrometry
O2, Ne, Ar ion source for positive ion spectrometry
Sensitivity range - ppm-ppb (mass/matrix dependent)
Maximum sample size - 2.0 cm diameter, 2 mm thick
Spatial resolution - 50 µm

This Perkin Elmer Physical Electronics Model 6300 dynamic SIMS system is equipped with both a cesium source for negative ion detection and an oxygen source for positive ion detection.