Perkin-Elmer PHI 600 Auger Electron Spectroscopy (1-D, 2-D elemental composition)

LaB6 source, analytical spot size ~ 250 nm
Sensitivity range - 0.05-1.0 atom %
Sputter ion gun for composition depth profiling
Maximum sample size - 2.5 cm diameter, 1 cm thick

Above: a Perkin Elmer Physical Electronics Model 600 Auger system, one of several surface analytical tools available.