LEO 1550 Scanning Electron Microscope with a ThermoNoran Voyager Energy Dispersive X-ray Detector and a MaxRAY WDS system
Excellent resolution at low beam voltages allows the LEO 1550 SEM to image organic particles and insulators with minimal charging effects.
Imaging resolution -
1 nm@15kV
3 nm @1kV
EDS resolution
100 nm
Wavelength Dispersion Spectroscopy (WDS)
Film thickness resolution
5 nm
Sample size
up to 6"
Typical applications: device structures, polymers, organic materials
