JEOL 2010F Transmission Electron Microscope (TEM) with EELS

Probe size (field emission) - 0.5 nm
Sample size - TEM grid - 3 mm
Resolution - 1.9Å spatial, 1.02 Å lattice
Beam - 200 keV
Energy Dispersive X-ray Spectroscopy (EDS) - Electron Energy Loss Spectroscopy (EELS) - Energy-filtered imaging
Cryogenic specimen holder

Typical applications: carbon nanotubes, quantum well structures, liners, gate oxides