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Kathleen Dunn
Dr. Kathleen Dunn
Associate Professor of Nanoscience

Watch Professor Dunn's "Inside CNSE" video interview on the capabilities of the transmission electron microscope

Degrees:
  • Ph.D. Materials Science, University of Wisconsin-Madison, 2001
  • M.S. Materials Science, University of Wisconsin-Madison, 1997
  • B.S. Applied & Engineering Physics, Cornell University, 1991
Areas of research:
  • Electron microscopy
  • Ion microscopy liners
  • Metallization
  • Defects in metals
  • Ultrafine wires
  • TEM, SEM, FIB, EELS, ALD, TEM-STM
Description of research:

Professor Dunn's research group has two main foci: the extension of traditional metal-based interconnects to the nanoscale regime as well as novel materials for next generation wiring schemes for semiconductor applications. In order to characterize such nanostructures, Dunn's group has also become involved in the development of electron and ion based characterization techniques.

The extension of conventional metals to the ultrafine regime (where the wire width approaches the mean free path of an electron) encounters both morphological as well as quantum mechanical effects that impact the conductivity of the metal wire. In the extreme case of atomic conductors, where a wire may be only one or two atoms wide, the conductivity is actually quantized. Dunn's team studies these wires using a specially modified transmission electron microscope (TEM) holder with connections which allow simultaneous electrical measurements. Other students working in this area are looking for novel means for controlling interfacial energies as a means to controlling nucleation and growth, while still others are investigating the microstructural origin of killer defects such as electromigration voids using advanced characterization techniques such as electron backscatter diffraction (EBSD) and electron energy loss spectroscopy (EELS).

Novel structures we are investigating include molecular conductors such as carbon nanotubes and artifically engineered biological molecules. Finally, Dunn's group recently became involved in high temperature superconductor research, since nanoscale phenomena often control the current carrying capabilities of these wires as well.

Recent Publications:
  1. J. Li, M. Toth, K.A. Dunn, and B. L. Thiel, "Interfacial mixing and internal structure of Pt-containing nanocomposites grown by room temperature electron beam induced deposition," J. Appl. Phys. 107 (10), 103540-103545 (2010).
  2. A. Botman, C.W. Hagen, J. Li, B.L. Thiel, K.A. Dunn, J.J.L. Mulders, S. Randolph, and M. Toth, "Electron postgrowth irradiation of platinum-containing nanostructures grow by electron beam-induced deposition from Pt(PF3)4," J. Vac. Sci & Tech. B 27(6), 2759-643 (2009).
  3. E. Stinzianni, K. Dunn, Z. Zhao, M. Rane-Fondacaro, H. Efstathiadis and P. Haldar, "Relationship of aluminum grain size to the grain size of polycrystalline silicon produced by the aluminum induced crystallization of amorphous silicon," Proc. 34th IEEE Photovoltaic Specialists Conference, 001643-8 (2009).
  4. A. E. Kaloyeros, J. Castracane, K. Dunn, E. Eisenbraun, A. Gadre, V. LaBella, T. Stoner, B.Xu, J. G. Ryan, and A. Topol, "Emerging Nanoscale Interconnect Processing Technologies: Fundamentals and Practice," Ch. 34 in Advanced Nanoscale ULSI Interconnects, ed. Y. Shacham-Diamand, T. Osaka, M. Datta, and T. Ohba, New York: Spring-Verlag 2009.
  5. A. E. Kaloyeros, K. A. Dunn, A.T. Carlsen, A. W. Topol, "Carbon Nanotube Interconnects," invited article for Dekker Encyclopedia of Nanoscience and Nanotechnology, Second Edition, ed. J.A. Schwarz, C.I Contescu, and K. Putyera, New York: Taylor & Francis 2009.
  6. R.J.J. van den Boom, H. Parvaneh, D. Voci, C. Huynh, L. Stern, K.A. Dunn, and E. Lifshin, "Helium ion beam microscopy for copper grain identification in BEOL structures," AIP Conference Proceedings: Frontiers of Characterization and Metrology for Nanoelectronics 2009, 1173, 309-313 (2009).
  7. E. Stinzianni, H. Efstathiadis, K.A. Dunn and P. Haldar, "Role of Temperature and Duration of the Crystallization Anneal in the Texture Development of YBCO Prepared by TFA-MOD," IEEE Transactions on Applied Superconductivity 19(3) pt. 3, 2877-81 (2009).
  8. J.Li, M. Toth, V. Tileli, K.A. Dunn, C.J. Lobo and B.L. Thiel, "Evolution of the nanostructure of deposits grown by electron beam induced deposition," Appl. Phys. Lett. 93, 023130 (2008).
  9. R.J.J. van den Boom, E. Lifshin, and K.A. Dunn, "Evolution of grain size and crystallographic orientation in narrow lines," Proc. Adv. Metallization Conf. 2007, 607-11 (2008).
  10. Y. Zhu, K.A. Dunn and A.E. Kaloyeros, "Atomic layer deposition of platinum for ultra-thin seed layer applications in advanced metallization schemes," J. Mater. Res. 22(5) 1292-1293 (2007).
Recent Presentations:
  1. K.A. Dunn, "Electron Beam Induced Nanostructure Patterning at Cryogenic Temperatures," invited presentation, Gordon Conference on Radiation Chemistry (Andover, NH: Proctor Academy, July 18-23, 2010).
  2. A. Botman, J.J.L. Mulders, C.W. Hagen, J.Li, B.L. Thiel, K.A. Dunn, S. Randolph and M. Toth, "Electron postgrowth irradiation of platinum-containing nanostructures grown by electron-beam-induced deposition from Pt(PF3)4," poster, The 3rd Focused Electron Beam Induced Processing Workshop (Albany, NY, July 15-16, 2010).
  3. M. Bresin and K.A. Dunn, "The Low Temperature Road: Materials manipulation and 3D Lithography using Condensed Phase Electron Beam-Induced-Deposition," presentation, The 3rd Focused Electron Beam Induced Processing Workshop (Albany, NY, July 15-16, 2010).
  4. M. Toth, J. Li, V. Tileli, K.A. Dunn, C. J. Lobo and B.L. Thiel, "Structure of Nanocomposites grown by electron beam induced deposition," presentation, The 54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (Anchorage, Alaska, June 1-4, 2010).
  5. M. Bresin, K.A. Dunn and M. Toth, "Condensed Phase Electron Beam-Induced-Deposition: 3D Lithography and Growth Rate Enhancement using Cryogenic Cooling," presentation, The 54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (Anchorage, Alaska, June 1-4, 2010).
  6. C. J. Lobo, M. Toth, S. Randolph, M. Bresin and K. Dunn, "Gas-mediated electron and ion beam induced deposition using ammonia as a purification medium," poster, The 54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (Anchorage, Alaska, June 1-4, 2010).
  7. K.A. Dunn, "How to give a better technical talk," guest lecture, CNSE Student Seminar Series (Albany, New York: College of Nanoscale Science & Engineering, University at Albany - SUNY: March 27, 2010).
  8. M. Bresin, K.A. Dunn and P. Rack, "Enhancement of CNT-AFM probes with electron beam induced deposition and etching," presentation, ISMI Advanced Metrology Advisory Group/Films Metrology Advisory Group Meeting (Albany, NY: International SEMATECH, March 3, 2010).
  9. M. Bresin and K.A. Dunn, "Surface Morphology Control and 3D Structure Development with Cryogenic Assisted Electron Beam-Induced-Deposition," presentation, AVS 56th International Symposium & Exhibition (San Jose, CA, November 9-13, 2009).
  10. K.A. Dunn, "Is technology making us less or more human in the workplace?," panelist (Albany, NY: BioTech Performance Festival, October 30, 2009).